<?xml version="1.0" encoding="UTF-8" standalone="no" ?>
  <Stackup schemaVersion="2.0">
    <Materials>
      <Material Name="Activ" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="357141.0" Color="00ff00"/>
      <Material Name="Metal1" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="21640000.0" Color="39bfff"/>
      <Material Name="Metal2" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="23190000.0" Color="ccccd9"/>
      <Material Name="Metal3" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="23190000.0" Color="d80000"/>
      <Material Name="Metal4" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="23190000.0" Color="93e837"/>
      <Material Name="Metal5" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="23190000.0" Color="dcd146"/>
      <Material Name="TopMetal1" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="27800000.0" Color="ffe6bf"/>
      <Material Name="TopMetal2" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="30300000.0" Color="ff8000"/>
      <Material Name="TopVia2" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="3143000.0" Color="ff8000"/>
      <Material Name="TopVia1" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="2191000.0" Color="ffe6bf"/>
      <Material Name="Via4" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="1660000.0" Color="deac5e"/>
      <Material Name="Via3" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="1660000.0" Color="9ba940"/>
      <Material Name="Via2" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="1660000.0" Color="ff3736"/>
      <Material Name="Via1" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="1660000.0" Color="ccccff"/>
      <Material Name="Cont" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="2390000.0" Color="00ffff"/>
      <Material Name="Passive" Type="Dielectric" Permittivity="6.6" DielectricLossTangent="0.0" Conductivity="0" Color="a0a0f0"/>
      <Material Name="SiO2" Type="Dielectric" Permittivity="4.1" DielectricLossTangent="0.0" Conductivity="0" Color="fffcad"/>
      <Material Name="Substrate" Type="Semiconductor" Permittivity="11.9" DielectricLossTangent="0" Conductivity="2.0" Color="01e0ff"/>
      <Material Name="EPI" Type="Semiconductor" Permittivity="11.9" DielectricLossTangent="0" Conductivity="5.0" Color="294fff"/>
      <Material Name="AIR" Type="Dielectric" Permittivity="1.0" DielectricLossTangent="0.0" Conductivity="0" Color="d0d0d0"/>
      <Material Name="LOWLOSS" Type="Conductor" Permittivity="1" DielectricLossTangent="0" Conductivity="1E10" Color="ff0000"/>
      <Material Name="MIM_equiv" Type="Dielectric" Permittivity="16.87" DielectricLossTangent="0.0" Conductivity="0" Color="ff0000"/>
			<!-- MIM comment: To avoid small FDTD timestep, thickness and permittivity of MIM dielectric are increased, for same target value 1.5 fF/um^2 -->  
		</Materials>
    <ELayers LengthUnit="um">
      <Dielectrics>
        <Dielectric Name="AIR" Material="AIR" Thickness="300.0000" />
        <Dielectric Name="Passive" Material="Passive" Thickness="0.4000" />
        <Dielectric Name="SiO2" Material="SiO2" Thickness="15.7303" />
        <Dielectric Name="EPI" Material="EPI" Thickness="3.7500" />
        <Dielectric Name="Substrate" Material="Substrate" Thickness="280.0000" />
      </Dielectrics>
      <Layers>
        <Substrate Offset="283.75"/>
        <Layer Name="Activ" Type="conductor" Zmin="0.0000" Zmax="0.4000" Material="Activ" Layer="1" />
        <Layer Name="Metal1" Type="conductor" Zmin="1.0400" Zmax="1.4600" Material="Metal1" Layer="8" />
        <Layer Name="Metal2" Type="conductor" Zmin="2.0000" Zmax="2.4900" Material="Metal2" Layer="10" />
        <Layer Name="Metal3" Type="conductor" Zmin="3.0300" Zmax="3.5200" Material="Metal3" Layer="30" />
        <Layer Name="Metal4" Type="conductor" Zmin="4.0600" Zmax="4.5500" Material="Metal4" Layer="50" />
        <Layer Name="Metal5" Type="conductor" Zmin="5.0900" Zmax="5.5800" Material="Metal5" Layer="67" />
        <Layer Name="TopMetal1" Type="conductor" Zmin="6.4303" Zmax="8.4303" Material="TopMetal1" Layer="126" />
        <Layer Name="TopMetal2" Type="conductor" Zmin="11.2303" Zmax="14.2303" Material="TopMetal2" Layer="134" />
        <Layer Name="TopVia2" Type="via" Zmin="8.4303" Zmax="11.2303" Material="TopVia2" Layer="133" />
        <Layer Name="TopVia1" Type="via" Zmin="5.5800" Zmax="6.4303" Material="TopVia1" Layer="125" />
        <Layer Name="Via4" Type="via" Zmin="4.5500" Zmax="5.0900" Material="Via4" Layer="66" />
        <Layer Name="Via3" Type="via" Zmin="3.5200" Zmax="4.0600" Material="Via3" Layer="49" />
        <Layer Name="Via2" Type="via" Zmin="2.4900" Zmax="3.0300" Material="Via2" Layer="29" />
        <Layer Name="Via1" Type="via" Zmin="1.4600" Zmax="2.0000" Material="Via1" Layer="19" />
        <Layer Name="Cont" Type="via" Zmin="0.4000" Zmax="1.0400" Material="Cont" Layer="6" />
        <Layer Name="LBE" Type="via" Zmin="-283.7500" Zmax="0.0000" Material="AIR" Layer="157" />
        <Layer Name="SUBGND" Type="via" Zmin="-3.75" Zmax="0" Material="LOWLOSS" Layer="210" />
        <Layer Name="MIM_DK" Type="conductor" Zmin="5.5800" Zmax="5.6800" Material="MIM_equiv" Layer="36" />
        <Layer Name="MIM" Type="conductor" Zmin="5.6800" Zmax="6.4303" Material="TopVia1" Layer="36" />
      </Layers>
    </ELayers>
  </Stackup>

