Is passing DRC strictly required to tapeout? Is there any waiver system? For example I want to make topmetal "pads" smaller than design rule pad sizes, as I want to post-process dies/wafers to add additional layers to the design.
that makes sense though, because of charging during plasma steps
20:59
a discharge event will cause spallation and can cover not only your wafer with particles, but the entire chamber... leading to later batches to get particle contam
Unfortunately, they don't apply to our use case and specify different numbers. While the solder bump (solder ball) rules specify a min. passivation opening of 40um, the probe guidelines specify min. probe passivation opening of 50um.
There's an interesting note in the bond pad guidelines:
These are just default numbers for DRC purpose only, however, these are VARIABLE and the customer is advised to use the appropriate value acceptable to their assembly house.
So I suppose there's no min. limit for the passivation opening specified, because they assume that you are going to use sane numbers anyway, in order to do the bonding process.